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	3D reconstruction and feature extraction for analysis of nanostructures by SEM imaging
	Zhu, Fu-Yun ; Wang, Qi-Qi ; Zhang, Xiao-Sheng ; Hu, Wei ; Zhao, Xin ; Zhang, Hai-Xia
	2013
英文摘要	An efficient method for 3D reconstruction of nanostructures based on the SEM imaging principle is reported in this paper. By analyzing the contrast of one single top-view SEM image which contains all the surface information of visible structures, both the 3D morphology and shape parameters of nanostructures can be obtained. Thus it can provide more details of nanostructures and conduct subsequent computational analysis in their performance and applications, such as roughness measurement, optical simulation and properties optimizing, and so on. It becomes a convenient and practical tool to observe nanostructures quantitatively as well as qualitatively. ? 2013 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/Transducers.2013.6627363
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/410815]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhu, Fu-Yun,Wang, Qi-Qi,Zhang, Xiao-Sheng,et al. 3D reconstruction and feature extraction for analysis of nanostructures by SEM imaging. 2013-01-01.

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