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	Linear Analysis of Closed Loop Capacitive Accelerometer Due to Distance Mismatch between Plates
	Huang Jingqing ; Zhao Meng ; Zhang Tingting ; Hong Lichen ; Wu Feng ; Zhang Yacong ; Lu Wengao ; Chen Zhongjian ; Hao Yilong
	2012
关键词	accelerometer MEMS linearity time divided closed loop mismatch
英文摘要	MEMS sensors often suffer from distance mismatch that the proof mass does not lie in the right middle of the two fixed plates. The mathematical formulae presented in this paper show that this asymmetry of MEMS sensor does not influence the linearity of accelerometer as a whole, and only introduces an offset. This is true not only for continuous time closed loop, but also for time divided architecture. For this kind of asymmetric sensors, Matlab/Simulink models are established. Simulation results confirm theoretical formulae. To testify this theory, a readout circuit of time divided architecture is designed and fabricated using 0.35 mu m HV CMOS process. Test results show that the nonlinearity of the tested accelerometer with the asymmetric sensor is within 0.3%.; Engineering, Electrical & Electronic; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/405964]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang Jingqing,Zhao Meng,Zhang Tingting,et al. Linear Analysis of Closed Loop Capacitive Accelerometer Due to Distance Mismatch between Plates. 2012-01-01.

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