A CAPACITIVE INTERFACE CIRCUIT WITH CAPACITOR MISMATCH AUTO-COMPENSATION   FOR MEMS GYROSCOPE

doi:10.1142/S021812661340032X

CORC > 北京大学 > 信息科学技术学院

	A CAPACITIVE INTERFACE CIRCUIT WITH CAPACITOR MISMATCH AUTO-COMPENSATION FOR MEMS GYROSCOPE
	Fang, Ran ; Lu, Wengao ; Wang, Guannan ; Tao, Tingting ; Zhang, Yacong ; Chen, Zhongjian ; Yu, Dunshan
刊名	journal of circuits systems and computers
	2013
关键词	Capacitor mismatch auto-compensation capacitive sensing circuit MEMS gyroscope SAR
DOI	10.1142/S021812661340032X
英文摘要	In this paper, a capacitive interface circuit with capacitor mismatch auto-compensation has been designed and implemented for MEMS gyroscope. An on-chip capacitor array controlled by an 8-bit SAR logic circuit is selected to be connected in parallel with the minor one of the two differerential gyroscope capacitors, making the two capacitors equal. The compensation progress takes eight periods of the clock at power-on and then will be turned off automatically. The chip is fabricated in a 0.35 mu m CMOS process. The test of the chip is performed with a vibratory gyroscope on the condition of a closed-loop control in the drive mode, and the measurement shows that the minimum capacitive compensation is 3.5 fF. Within -300 degrees /s to 300 degrees /s of rotation rate input range, the nonlinearity is less than 0.1%.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000209245200014&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Computer Science, Hardware & Architecture; Engineering, Electrical & Electronic; SCI(E); EI; 1; ARTICLE; 10,SI; 22
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/390778]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Ran,Lu, Wengao,Wang, Guannan,et al. A CAPACITIVE INTERFACE CIRCUIT WITH CAPACITOR MISMATCH AUTO-COMPENSATION FOR MEMS GYROSCOPE[J]. journal of circuits systems and computers,2013.
APA	Fang, Ran.,Lu, Wengao.,Wang, Guannan.,Tao, Tingting.,Zhang, Yacong.,...&Yu, Dunshan.(2013).A CAPACITIVE INTERFACE CIRCUIT WITH CAPACITOR MISMATCH AUTO-COMPENSATION FOR MEMS GYROSCOPE.journal of circuits systems and computers.
MLA	Fang, Ran,et al."A CAPACITIVE INTERFACE CIRCUIT WITH CAPACITOR MISMATCH AUTO-COMPENSATION FOR MEMS GYROSCOPE".journal of circuits systems and computers (2013).