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	Electro-thermally actuated RF MEMS switch for wireless communication
	Li, Xiuhan ; Yin, Li ; Hu, Jin Bin ; Lang, Leijie ; Liu, Jian ; Xia, Yu ; Fang, Dongming ; Zhang, Haixia
	2010
英文摘要	This paper presents a lateral resistive-contact electrothermally actuated MEMS switch for wireless communication applications. It is manufactured on a standard low-resistivity substrate, and its RF performance was improved by suspending the structures 25??m from the substrate, which is good for future integration with active devices in the system-on-chip concept. The switch is driven by a metal electrothermal actuator, which can generate large displacements and contact forces at lower temperatures than polysilicon electrothermal actuators. Measurement results show that the RF MEMS switch have good performance under DC of 0.9 to 1.1A from 0-20GHz. ?2010 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2010.5592443
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/329795]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Xiuhan,Yin, Li,Hu, Jin Bin,et al. Electro-thermally actuated RF MEMS switch for wireless communication. 2010-01-01.

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