Single-walled carbon nanotue pirani vacuum gauge | |
Li, Wei ; Wang, Zhihui ; Zhang, Jinwen | |
2010 | |
英文摘要 | This paper presents the design, fabrication and synthesis of a carbon nanotube Pirani vacuum gauge which comprises 5-??m-long SWNTs as heater and Au/W as electrodes. Results show that the TCR of SWNTs is negative and about -0.004/??C. SWNTs Pirani vacuum gauge was demonstrated with a dynamic range of 2500Pa to 40Pa in air environment. The average sensitivity of SWNTs Pirani vacuum gauge is about 914??/Pa and the power consumption is lower than 10??W. ?2010 IEEE.; EI; 0 |
语种 | 英语 |
DOI标识 | 10.1109/ICSICT.2010.5667603 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/295452] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Li, Wei,Wang, Zhihui,Zhang, Jinwen. Single-walled carbon nanotue pirani vacuum gauge. 2010-01-01. |
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