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Single-walled carbon nanotue pirani vacuum gauge
Li, Wei ; Wang, Zhihui ; Zhang, Jinwen
2010
英文摘要This paper presents the design, fabrication and synthesis of a carbon nanotube Pirani vacuum gauge which comprises 5-??m-long SWNTs as heater and Au/W as electrodes. Results show that the TCR of SWNTs is negative and about -0.004/??C. SWNTs Pirani vacuum gauge was demonstrated with a dynamic range of 2500Pa to 40Pa in air environment. The average sensitivity of SWNTs Pirani vacuum gauge is about 914??/Pa and the power consumption is lower than 10??W. ?2010 IEEE.; EI; 0
语种英语
DOI标识10.1109/ICSICT.2010.5667603
内容类型其他
源URL[http://ir.pku.edu.cn/handle/20.500.11897/295452]  
专题信息科学技术学院
推荐引用方式
GB/T 7714
Li, Wei,Wang, Zhihui,Zhang, Jinwen. Single-walled carbon nanotue pirani vacuum gauge. 2010-01-01.
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