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	A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors
	Yang, Zhenchuan ; Wang, Congshun ; Yan, Guizhen ; Hao, Yilong ; Wu, Guoying
	2005
英文摘要	A bulk micromachined lateral axis single crystal silicon gyroscope with lateral driving comb electrodes and vertical differential sensing comb capacitors is designed, fabricated and tested. The neighboring electrodes of the newly designed sensing capacitors have different thickness at the lower side, so the capacitors can differentially sense vertical motion and have low air damping. A bulk micromachining process compatible with previous reported accelerometers and z-axis gyroscopes fabrication is demonstrated. The fabricated gyroscope is tested at atmospheric environment, and it has a sensitivity of 0.8mv/??/s, and the noise equivalent angular rate of 0.1??/s/Hz 1/2. ? 2005 IEEE.; EI; 4
语种	英语
DOI标识	10.1016/j.compag.2004.11.018
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295264]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yang, Zhenchuan,Wang, Congshun,Yan, Guizhen,et al. A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors. 2005-01-01.

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