Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers | |
Wang, J. ; Feng, B. ; Li, C. ; Zhang, F.Q. ; Ding, K. ; Wu, W.G. | |
2011 | |
英文摘要 | This paper reports a kind of intercoupled silicon dual-microcantilevers for ultrasensitive mass detection based on the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the dual-cantilevers. The structural intercoupling of the dual-cantilevers arises from the coupling overhang connecting them at the base. The whole structure operation is excited by a piezoactuator under ambient conditions. Experimental results indicate that the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the structure is linear as a function of added mass, and it is more than one order of magnitude greater than the relative change in resonance frequency of in-phase vibration eigenstate. ? 2011 IEEE.; EI; 0 |
语种 | 英语 |
DOI标识 | 10.1109/TRANSDUCERS.2011.5969204 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/295216] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Wang, J.,Feng, B.,Li, C.,et al. Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers. 2011-01-01. |
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