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	Novel 3D nano-fence matrixes for integrated nanofluidic channels
	Ma, P.C. ; Zhang, K. ; Wu, Wengang
	2014
英文摘要	Combining the advanced silicon etch system (ASETM) with electron beam lithography (EBL), we utilize the silicon sidewall scallops to fabricate 3D nano-fence matrixes for nanofluidic channels. We acquire the scallop size and the effective range of nano mask width for the formation of nano-fences under a fixed etch recipe. We then realize the controllability of fabricating silicon fences by simply varying the nano mask width. The fence matrixes make the micro-channel into integrated nano-channels, which will be very useful for fluid purification, segregation and bias application in certain fluid detection. ? 2014 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2014.6908837
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295144]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, P.C.,Zhang, K.,Wu, Wengang. Novel 3D nano-fence matrixes for integrated nanofluidic channels. 2014-01-01.

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