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	A Si3N4 tube formed using TMAH etching
	Chen, Huijun ; Zhang, Dacheng
	2007
英文摘要	In this paper, micro-tube fabricated from SiO2/Si 3N4 strained composite structures using a self-scrolling procedure is presented. This fabrication is a self-organization process using stress of bifilm. This technique is based on self-rolling of a thin highly strained SiO2/ Si3N4 bifilm detached from the substrate by TMAH selective etching. The material of bifilm and the solution for anisotropic etching are in common use, so this method can be widely used in the future. Copyright ? 2007 by ASME.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295126]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Chen, Huijun,Zhang, Dacheng. A Si3N4 tube formed using TMAH etching. 2007-01-01.

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