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	Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope
	Liu, Y.X. ; Feng, W.L. ; He, C.H. ; Wang, L. ; Dong, L.G. ; Zhao, Q.C. ; Yang, Z.C. ; Yan, G.Z.
	2014
英文摘要	This paper presents a digital closed loop control method for the sense mode of a mode-matching MEMS vibratory gyroscope. The sense closed loop system reported in our previous work is relatively complex and unreliable due to the existence of notch filter. In this work, a more simple and robust control system is realized with the help of mode-matching control. With a tuning voltage automatically applied on the tuning combs of the gyroscope, a frequency split of less than 0.3 Hz is achieved. Experimental results show that the mode-matched gyroscope achieves a scale factor of 18.5mV/deg/s with a nonlinearity of 0.088% and a bias instability of 2.7deg/h. ? 2014 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2014.6908790
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294874]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, Y.X.,Feng, W.L.,He, C.H.,et al. Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope. 2014-01-01.

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