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	A practical suspended spiral inductor for MMIC application
	Fang, Min ; Wang, Jin-Yan ; Lin, Shu-Xun ; Meng, Di ; Cai, Yong ; Hao, Yi-Long ; Wen, Cheng P.
	2011
英文摘要	In this paper, we propose an air-bridge based on-chip suspended inductor for MMIC application. The quality factor of suspended inductor on sapphire is 10.6 at 4.0 GHz, which is improved by almost 50%, comparing with traditional air-bridge based inductor of the same size. The self-resonance frequency is also improved from 9 GHz to 10 GHz. Several key fabrication processes of this suspended inductor will be presented to illustrate that our method is exactly the same as general air-bridge inductor fabrication processes in MMIC. By analyzing the equivalent circuits of RF inductors, it is shown that the suspended inductor yields lower parasitic capacitance and suffers smaller substrate loss. ? 2011 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/MAPE.2011.6156291
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294871]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Min,Wang, Jin-Yan,Lin, Shu-Xun,et al. A practical suspended spiral inductor for MMIC application. 2011-01-01.

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