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	Suspended nanoscale solenoid metal inductor with tens-nH level inductance
	Lai, X. H. ; Ding, F. ; Xu, Z. G. ; Wu, W. G. ; Xu, J. ; Hao, Y. L.
	2008
关键词	SILICON
英文摘要	This paper reports a novel suspended nanoscale solenoid metal inductor with inductance of several tens-nH for analog-circuit and radio-frequency application. The nanoscale inductors consist of three-dimensional aluminum or gold nanohelices, which are transformed from nanometer thick metal cantilevers by focused-ion-beam stress-introducing technology. For the inductor with a two-turn helix conductor, the inductance is measured to reach more than 20 nH while the structure size is less than 10 x 2 mu m(2). The quality factor is 1.4 at 100 MHz, and might increase to about several tens at Gigahertz. The inherent series resistance of the two-turn inductor is 10.6 Ohm.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000253356900250&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Engineering, Mechanical; CPCI-S(ISTP); 4
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293683]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Lai, X. H.,Ding, F.,Xu, Z. G.,et al. Suspended nanoscale solenoid metal inductor with tens-nH level inductance. 2008-01-01.

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