High Performance Zn1-xMgxO TFTs for Ultraviolet Image Sensors | |
Lin, X. ; Jiang, B. B. ; He, X. ; Li, S. J. ; Li, Y. L. ; Zhang, S. D. | |
2011 | |
英文摘要 | This paper reports the studies on Zn1-xMgxO TFTs for UV image sensors. The channel layer of TFTs was deposited by reactive DC magnetron sputtering with Zn&Mg insetting metal target for the first time. These Zn1-xMgxO TFTs on glass substrate show excellent UV absorption window with absorption edge of 340 nm and optical transmittance of >90% in the visible range. They display a field effect mobility of 0.02 cm (2)V(-1)s(-1), a threshold voltage of 10 V, an on/off ratio of 6x10(5), and a subthreshold swing of 0.5 V/decade.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000304037500164&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Physics, Applied; EI; CPCI-S(ISTP); 0 |
语种 | 英语 |
DOI标识 | 10.1109/EDSSC.2011.6117745 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/292915] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Lin, X.,Jiang, B. B.,He, X.,et al. High Performance Zn1-xMgxO TFTs for Ultraviolet Image Sensors. 2011-01-01. |
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