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	Electromagnetic simulation on high-frequency solenoid inductors formed by focused-ion-beam stress-introducing technique
	Li, Xiao ; Tan, Guo ; Xia, Ling ; Lai, Xihu ; Wu, Wengang
	2007
英文摘要	This paper reports the electromagnetic simulation on solenoid-structure inductors for high frequency applications. The components are achieved by the focused-ion-beam stress-introducing technique. The influence of various structure parameters such as the pitch, diameter, number of turns have been analyzed in detail using the Ansoft HFSS simulator. For the inductor with a diameter of about one hundred microns, a wide operation frequency range as well as a maximum quality factor (Q) of 114 can be obtained. For the inductor with a diameter of several hundred nanometers, a maximum Q of more than 7 at THz is predicted. ? 2006 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/ICSICT.2006.306191
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153704]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Xiao,Tan, Guo,Xia, Ling,et al. Electromagnetic simulation on high-frequency solenoid inductors formed by focused-ion-beam stress-introducing technique. 2007-01-01.

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