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	A simple micro pirani vacuum gauge fabricated by bulk micromachining technology
	Jinwen, Zhang ; Wei, Jiang ; Jilong, Zhou ; Xin, Wang
	2009
英文摘要	In this paper, a very simple micro vacuum pirani gauge made of single crystal silicon is presented. It was fabricated by standard bulk micromachining with only three masks. The high aspect ratio structure of the pirani gauge has large efficient gaseous heat transfer area, thus can increase the sensitivity of the pirani gauge. The dynamic range of the pirani gauge is 2Pa to 400Pa which should be larger if the power of the current source be larger with high sensitivity. And the average sensitivity is 184 K/W/Pa. ?2009 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/SENSOR.2009.5285508
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153587]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Jinwen, Zhang,Wei, Jiang,Jilong, Zhou,et al. A simple micro pirani vacuum gauge fabricated by bulk micromachining technology. 2009-01-01.

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