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	Surface Micromachined Cantilever Arrays for Infrared Imaging
	Yi, Yuliang ; Yu, Xiaomei ; Liu, Ming ; Liu, Xiaohua ; Zhao, Yuejin
	2008
关键词	DETECTORS
英文摘要	This paper presents the design, fabrication and performance of a bimaterial microcantilever focal plane array (FPA) of 256x256 pixels for uncooled infrared (IR) imaging. The microcantilevers made of silicon nitride (SiNx) and gold (Au) convert incident IR energy to a distribution of deflection angles among the FPA pixels according to the IR source, which is read out by an optical method. The thermo-mechanical sensitivity of the cantilever pixel was measured to be 147nm/K. The noise equivalent temperature difference (NETD) of the FPA was theoretically estimated to be 130mK and the response time was calculated to be 12ms. Thermal image of the heated brand iron were captured by the fabricated FPA. The most valuable feature of the implemented FPA is their scalability to high resolution formats without progressively growing fabrication complexity and cost.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000265971003147&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Physics, Applied; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/ICSICT.2008.4735078
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153467]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yi, Yuliang,Yu, Xiaomei,Liu, Ming,et al. Surface Micromachined Cantilever Arrays for Infrared Imaging. 2008-01-01.

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