Improving the resolution and the uniformity of AFM tip induced oxide   patterns with pulsed voltages

doi:10.1016/j.apsusc.2004.02.051

CORC > 北京大学 > 信息科学技术学院

	Improving the resolution and the uniformity of AFM tip induced oxide patterns with pulsed voltages
	Shen, ZY ; Sun, H ; Hou, SM ; Zhao, XY ; Xue, ZQ
刊名	应用表面科学
	2004
关键词	atomic force microscopy titanium film oxide patterns pulsed voltages ATOMIC-FORCE-MICROSCOPE OXIDATION NANOFABRICATION SILICON TRANSISTORS FABRICATION LITHOGRAPHY KINETICS MODEL
DOI	10.1016/j.apsusc.2004.02.051
英文摘要	Oxide line patterns were fabricated on the surface of titanium (Ti) film using atomic force microscopy (AFM) tip induced local oxidation technique. The growth behavior of the oxide under static voltages was studied. It was found the lateral growth of the oxide experienced two stages and the growth rate at the initial stage was very high. Pulsed voltages were employed and their effects on the controlling of the oxidation dynamics were examined. The results indicated that the high lateral and vertical growth rates of oxide at the initial stage could be suppressed with pulsed voltages. A minimum line width of 8 nm and highly uniform patterns were obtained with optimized voltage pulses. These results indicated that applying pulsed voltage is an effective method for improving both the resolution and the uniformity of the fabricated structures with scanning probe microscopy (SPM) tip induced local oxidation technique. (C) 2004 Elsevier B.V. All rights reserved.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000221968100042&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter; SCI(E); EI; 2; ARTICLE; 1-4; 340-344; 230
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153088]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Shen, ZY,Sun, H,Hou, SM,et al. Improving the resolution and the uniformity of AFM tip induced oxide patterns with pulsed voltages[J]. 应用表面科学,2004.
APA	Shen, ZY,Sun, H,Hou, SM,Zhao, XY,&Xue, ZQ.(2004).Improving the resolution and the uniformity of AFM tip induced oxide patterns with pulsed voltages.应用表面科学.
MLA	Shen, ZY,et al."Improving the resolution and the uniformity of AFM tip induced oxide patterns with pulsed voltages".应用表面科学 (2004).