A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With   Decoupled Comb Drive Operating at Atmospheric Pressure

doi:10.1109/JMEMS.2010.2046477

CORC > 北京大学 > 信息科学技术学院

	A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure
	Guo, Zhong Yang ; Lin, Long Tao ; Zhao, Qian Cheng ; Yang, Zhen Chuan ; Xie, Huikai ; Yan, Gui Zhen
刊名	journal of microelectromechanical systems
	2010
关键词	Decoupling gyroscopes lateral-axis gyroscopes microelectromechanical systems (MEMS) out-of-plane motion sensing tuning-fork gyroscopes (TFGs) MICROMACHINED GYROSCOPE OSCILLATION MODES MEMS MICROGYROSCOPE WAFER
DOI	10.1109/JMEMS.2010.2046477
英文摘要	In this paper, a silicon bulk micromachined lateral-axis tuning-fork gyroscope (TFG) with a decoupled comb drive and torsional sensing comb capacitors is presented. The novel driving comb capacitors are used to suppress the parasitic out-of-plane electrostatic force and, hence, can decouple the mechanical crosstalk from the sensing mode to the driving mode in a simple manner. The torsional sensing combs are designed to differentially sense the out-of-plane rotational moment and are arranged centroidally to be immune to fabrication imperfections for good linearity and electrostatic force balancing. The torsional sensing combs adopted in the TFG help to lower the air damping of the sensing mode while the driving mode of the gyroscope is dominated by slide-film air damping; hence, it can work even at atmospheric pressure. The process for this lateral-axis gyroscope can also be used to fabricate z-axis gyroscopes; therefore, low-cost miniature monolithic inertial measurement units can be realized without vacuum packaging. The TFG is tested at atmospheric pressure with a sensitivity of 17.8 mV/degrees/s and a nonlinearity of 0.6% in a full-scale range of 1000 degrees/s. The bias stability is measured to be 0.05 degrees/s (1 sigma) in 30 min with an equivalent noise angular rate of 0.02 degrees/s/Hz(1/2).; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000278537900004&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Engineering, Mechanical; SCI(E); EI; 16; ARTICLE; 3; 458-468; 19
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152719]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Guo, Zhong Yang,Lin, Long Tao,Zhao, Qian Cheng,et al. A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure[J]. journal of microelectromechanical systems,2010.
APA	Guo, Zhong Yang,Lin, Long Tao,Zhao, Qian Cheng,Yang, Zhen Chuan,Xie, Huikai,&Yan, Gui Zhen.(2010).A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure.journal of microelectromechanical systems.
MLA	Guo, Zhong Yang,et al."A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure".journal of microelectromechanical systems (2010).