Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for   Low Frequency Applications

doi:10.1109/JMEMS.2013.2267773

CORC > 北京大学 > 信息科学技术学院

	Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications
	Han, Mengdi ; Yuan, Quan ; Sun, Xuming ; Zhang, Haixia
刊名	journal of microelectromechanical systems
	2014
关键词	Electromagnetic energy harvester low frequency system-level simulation CoNiMnP electroplating MICRO POWER GENERATOR OPTIMIZATION VIBRATIONS MICROGENERATOR OPERATION SYSTEMS ARRAYS
DOI	10.1109/JMEMS.2013.2267773
英文摘要	An integrated vibration-to-electrical MEMS electromagnetic energy harvester with low resonant frequency is designed, simulated, fabricated and tested. Special structures and magnet arrays of the device are designed and simulated for favorable low frequency performance. Both FEM simulations and system-level simulations are conducted to investigate the induced voltage of the device. Two types of harvester are fabricated with different magnet arrays and the magnetic field of the two harvesters is investigated. With the combination of the microfabricated metal structures and the electroplated CoNiMnP permanent micro magnets, the designed harvesters are of small size (5 mm x 5 mm x 0.53 mm) without manual assembly of conventional bulk magnets. The output power density is 0.03 mu W/cm(3) with optimized resistance load at 64 Hz. This magnetic harvester is suitable for batch fabrication through MEMS process and can be utilized to drive microelectronic devices, such as micro implantable and portable devices.; Engineering, Electrical & Electronic; Engineering, Mechanical; SCI(E); EI; 10; ARTICLE; hanmems@gmail.com; spring4928@gmail.com; sunxuming@pku.edu.cn; zhang-alice@pku.edu.cn; 1; 204-212; 23
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152183]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Han, Mengdi,Yuan, Quan,Sun, Xuming,et al. Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications[J]. journal of microelectromechanical systems,2014.
APA	Han, Mengdi,Yuan, Quan,Sun, Xuming,&Zhang, Haixia.(2014).Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications.journal of microelectromechanical systems.
MLA	Han, Mengdi,et al."Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications".journal of microelectromechanical systems (2014).