A 3-D Stacked High-Q PI-Based MEMS Inductor for Wireless Power   Transmission System in Bio-Implanted Applications

doi:10.1109/JMEMS.2013.2297627

CORC > 北京大学 > 信息科学技术学院

	A 3-D Stacked High-Q PI-Based MEMS Inductor for Wireless Power Transmission System in Bio-Implanted Applications
	Sun, Xuming ; Peng, Xuhua ; Zheng, Yang ; Li, Xiuhan ; Zhang, Haixia
刊名	journal of microelectromechanical systems
	2014
关键词	Quality factor bio-implanted electrodeposition MEMS inductor wireless power transmission COUPLED MAGNETIC RESONANCES SENSORS ACTUATORS DESIGN NEUROSTIMULATOR SILICON CORE COIL
DOI	10.1109/JMEMS.2013.2297627
英文摘要	This paper presents high-Q factor 3-D stacked MEMS inductors on polyimide substrate for wireless power transmission systems. The 3-D double layer stacked structure was designed, fabricated, and characterized, and self-planarization of polyimide was realized. The 3-D inductor achieves an inductance of 7.189 mu H with a high-Q factor of 26.1 at 4.3 MHz. An inductively coupled wireless power transmission system was set up using the 3-D inductor in combination with a solenoid transmitting coil. At the resonant frequency of 1.6 MHz, the peak-to-peak output open circuit voltage could reach 5.2 V with a maximum power transmission efficiency of 11.74% and an output power of 35.5 mW. Effects of the load impedance and transmission distance on the output power were also investigated. Using this wireless transmission system, the driving of an implanted 3-D microelectrode array for neural prosthesis was demonstrated successfully, indicating that this 3-D stacked MEMS inductor design shows promise for applications in supplying power for implanted medical devices. [2013-0228]; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000341573300016&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Engineering, Mechanical; SCI(E); EI; 3; ARTICLE; sunxuming@pku.edu.cn; estel.pxh@gmail.com; zywjlxfsyj@163.com; lixiuhan@bjtu.edu.cn; zhang-alice@pku.edu.cn; 4; 888-898; 23
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152035]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Sun, Xuming,Peng, Xuhua,Zheng, Yang,et al. A 3-D Stacked High-Q PI-Based MEMS Inductor for Wireless Power Transmission System in Bio-Implanted Applications[J]. journal of microelectromechanical systems,2014.
APA	Sun, Xuming,Peng, Xuhua,Zheng, Yang,Li, Xiuhan,&Zhang, Haixia.(2014).A 3-D Stacked High-Q PI-Based MEMS Inductor for Wireless Power Transmission System in Bio-Implanted Applications.journal of microelectromechanical systems.
MLA	Sun, Xuming,et al."A 3-D Stacked High-Q PI-Based MEMS Inductor for Wireless Power Transmission System in Bio-Implanted Applications".journal of microelectromechanical systems (2014).