Effect of Al content on the microstructure and mechanical properties of Mo–Al–Si–Nﬁlms synthesized by DC magnetron sputtering

	Effect of Al content on the microstructure and mechanical properties of Mo–Al–Si–Nﬁlms synthesized by DC magnetron sputtering
	Z.G. Yuan ; J.F. Yang ; X.P. Wang ; Q.F. Fang
刊名	Surface & Coatings Technology
	2010
期号	204
学科主题	新型功能材料与固体内耗
收录类别	SCI
公开日期	2011-09-22
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn/handle/334002/4457]
专题	合肥物质科学研究院_中科院固体物理研究所
推荐引用方式 GB/T 7714	Z.G. Yuan,J.F. Yang,X.P. Wang,et al. Effect of Al content on the microstructure and mechanical properties of Mo–Al–Si–Nﬁlms synthesized by DC magnetron sputtering[J]. Surface & Coatings Technology,2010(204).
APA	Z.G. Yuan,J.F. Yang,X.P. Wang,&Q.F. Fang.(2010).Effect of Al content on the microstructure and mechanical properties of Mo–Al–Si–Nﬁlms synthesized by DC magnetron sputtering.Surface & Coatings Technology(204).
MLA	Z.G. Yuan,et al."Effect of Al content on the microstructure and mechanical properties of Mo–Al–Si–Nﬁlms synthesized by DC magnetron sputtering".Surface & Coatings Technology .204(2010).