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Metal Al produced by H-2 plasma reduction of AlCl3: A thermodynamic and kinetic study on the plasma chemistry
Zheng, Jie ; Sun, Bo ; Yang, Rong ; Song, Xubo ; Li, Xingguo ; Pu, Yikang
刊名journal of physical chemistry b
2008
关键词CHEMICAL-VAPOR-DEPOSITION ARGON GLOW-DISCHARGE HYDROGEN REDUCTION CARBON NANOTUBES DIAMOND FILMS GAS-PHASE RF PLASMA SILICON CHLORIDE GROWTH
DOI10.1021/jp8035204
英文摘要In this paper we reported that low temperature plasma may reverse the direction of a chemical reaction. The thermodynamically forbidden reaction between H-2 and AlCl3 was able to take place with the assistance of low temperature plasma, yielding metal Al. The plasma chemistry of the reaction was investigated by optical emission spectroscopy, which suggested that the dissociation of H-2 and AlCl3 molecules by plasma led the reaction to a thermodynamically favorable one by creating reaction channels with low Gibbs free energy change. The addition of Ar promoted the reaction kinetics dramatically, which was attributed to the enhanced dissociation of AlCl3 molecules by excited Ar species.; Chemistry, Physical; SCI(E); EI; PubMed; 7; ARTICLE; 40; 12748-12752; 112
语种英语
内容类型期刊论文
源URL[http://ir.pku.edu.cn/handle/20.500.11897/150154]  
专题化学与分子工程学院
工学院
推荐引用方式
GB/T 7714
Zheng, Jie,Sun, Bo,Yang, Rong,et al. Metal Al produced by H-2 plasma reduction of AlCl3: A thermodynamic and kinetic study on the plasma chemistry[J]. journal of physical chemistry b,2008.
APA Zheng, Jie,Sun, Bo,Yang, Rong,Song, Xubo,Li, Xingguo,&Pu, Yikang.(2008).Metal Al produced by H-2 plasma reduction of AlCl3: A thermodynamic and kinetic study on the plasma chemistry.journal of physical chemistry b.
MLA Zheng, Jie,et al."Metal Al produced by H-2 plasma reduction of AlCl3: A thermodynamic and kinetic study on the plasma chemistry".journal of physical chemistry b (2008).
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