Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy

doi:10.1016/j.ijleo.2018.05.137

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy
	Zhang, Yinhua 1,2; Zhang, Kepeng 1,2; Huang, Wei 1; Xiong, Shengming 1
刊名	OPTIK
	2018
卷号	170 页码:321-327
关键词	YbF3 thin film ZnS thin film Refractive index Transmittance spectra
ISSN号	0030-4026
DOI	10.1016/j.ijleo.2018.05.137
文献子类	J
英文摘要	The refractive index of the infrared thin films was calculated by a relatively simple and accurate spectroscopy method. Using the Sellmeier dispersion model, the refractive index and thickness of the Zinc sulfide(ZnS) thin film were obtained by fitting the transmittance in the range of 2.5 mu m-11 mu m. At the same time, the refractive index and thickness of the ZnS thin films were also measured by VASE ellipsometer. The results show that the refractive index deviation between the values fitted by the transmittance and that measured by the VASE ellipsometer is < 0.02, and the relative deviation of the thickness is < 1%.The YbF3/ZnS bilayer coatings were deposited on the CVD Zinc selenide(ZnSe) substrate to obtain the refractive index of the ytterbium fluoride(YbF3) thin films wrapped in the coatings. Using the Sellmeier dispersion model, the refractive index of the YbF3 thin film wrapped in the coatings was obtained by fitting the transmittance of the YbF3/ZnS bilayer coatings in the range of 2.5 mu m-11 mu m. The results show that there are significant differences in the refractive index of the YbF3 thin films wrapped in coatings and that exposed to the atmosphere.The refractive index of the YbF3 thin film exposed to the atmosphere is abrupt because the YbF3 thin films adsorbs water vapor, while that of the YbF3 thin film wrapped in the coatings is no mutation.
WOS关键词	OPTICAL-CONSTANT DETERMINATION ; ELLIPSOMETRY ; THICKNESS ; STRESS
语种	英语
WOS记录号	WOS:000440882500040
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9352]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Zhang, Yinhua,Zhang, Kepeng,Huang, Wei,et al. Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy[J]. OPTIK,2018,170:321-327.
APA	Zhang, Yinhua,Zhang, Kepeng,Huang, Wei,&Xiong, Shengming.(2018).Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy.OPTIK,170,321-327.
MLA	Zhang, Yinhua,et al."Determination of infrared refractive index of ZnS and YbF3 thin films by spectroscopy".OPTIK 170(2018):321-327.