Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods | |
Zhang, Yinhua1,2; Xiong, Shengming1; Huang, Wei1; Zhang, Kepeng1,2 | |
刊名 | ADVANCED OPTICAL TECHNOLOGIES |
2018-04-01 | |
卷号 | 7期号:1-2页码:33-37 |
关键词 | Bias Voltage Refractive Index Transmittance Spectra Ybf3 Thin Film |
ISSN号 | 2192-8576 |
DOI | 10.1515/aot-2017-0072 |
文献子类 | J |
英文摘要 | Ytterbium fluoride (YbF3) single thin films were prepared on sapphire and monocrystalline silicon substrates through conventional thermal evaporation and ion beam-assisted deposition (IAD), at bias voltages ranging from 50 to 160 V of the Leybold advanced plasma source (APS). By using the Cauchy dispersion model, the refractive index and thickness of the YbF3 thin films were obtained by fitting the 400-2500 nm transmittance of the monolayer YbF3 thin films on the sapphire substrate. At the same time, the refractive index and thickness of the YbF3 thin films on the monocrystalline silicon substrates were also measured using the VASE ellipsometer at wavelength from 400 to 2200 nm. The results showed that the refractive index deviation of the YbF3 thin films between the fitted values by the transmittance spectra and the measured values by the VASE ellipsometer was < 0.02 and the relative deviation of the thickness was < 1%. Furthermore, the refractive index of the YbF3 thin films increased with increasing APS bias voltage. The conventional YbF3 thin films and the IAD thin films deposited at low bias voltage revealed a negative inhomogeneity, and a higher bias voltage is beneficial for improving the homogeneity of YbF3 thin films. |
WOS关键词 | Optical-constant Determination ; Assisted Deposition ; Synthetic Sapphire ; Coating Materials |
语种 | 英语 |
WOS记录号 | WOS:000429104400004 |
内容类型 | 期刊论文 |
源URL | [http://ir.ioe.ac.cn/handle/181551/9244] |
专题 | 光电技术研究所_薄膜光学技术研究室(十一室) |
作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China; 2.University of Chinese Academy of Science, Beijing 100049,China |
推荐引用方式 GB/T 7714 | Zhang, Yinhua,Xiong, Shengming,Huang, Wei,et al. Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods[J]. ADVANCED OPTICAL TECHNOLOGIES,2018,7(1-2):33-37. |
APA | Zhang, Yinhua,Xiong, Shengming,Huang, Wei,&Zhang, Kepeng.(2018).Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods.ADVANCED OPTICAL TECHNOLOGIES,7(1-2),33-37. |
MLA | Zhang, Yinhua,et al."Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods".ADVANCED OPTICAL TECHNOLOGIES 7.1-2(2018):33-37. |
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