Ta-doped In2O3 transparent conductive films with high transmittance and low resistance

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	Ta-doped In2O3 transparent conductive films with high transmittance and low resistance
	Wang, Biao 1; Hu, LiMing 1; Liu, FengMin 2; Qin, Li 1; Liu, Yun 1; Wang, LiJun 1
刊名	OPTICA APPLICATA
	2010
卷号	40 期号:1 页码:25-31
关键词	Sputtering In2o3 Transparent Conductive Oxide Thin Films
ISSN号	0078-5466
英文摘要	Ta-doped In2O3 transparent conductive oxide (TCO) thin films are deposited on glass substrates by radio-frequency (RF) sputtering at room-temperature. The influence of sputtering power on the structural, morphologic, electrical, and optical properties of the films is investigated by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), Hall measurement, and optical transmission spectroscopy. The obtained films are polycrystalline with a cubic structure and preferentially oriented in the (222) crystallographic direction. The minimum resistivity of 2.8x10(-4) Omega cm is obtained from the film deposited at the sputtering power of 170 W. The average optical transmittance of the films is over 90%.
语种	英语
出版者	TECHNICAL UNIV WROCLAW
WOS记录号	WOS:000277647100003
内容类型	期刊论文
源URL	[http://ir.iccas.ac.cn/handle/121111/68989]
专题	中国科学院化学研究所
通讯作者	Wang, Biao
作者单位	1.Chinese Acad Sci, Key Lab Excited State Proc, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China 2.Chinese Acad Sci, State Key Lab Polymer Phys & Chem, Changchun Inst Appl Chem, Changchun 130022, Peoples R China
推荐引用方式 GB/T 7714	Wang, Biao,Hu, LiMing,Liu, FengMin,et al. Ta-doped In2O3 transparent conductive films with high transmittance and low resistance[J]. OPTICA APPLICATA,2010,40(1):25-31.
APA	Wang, Biao,Hu, LiMing,Liu, FengMin,Qin, Li,Liu, Yun,&Wang, LiJun.(2010).Ta-doped In2O3 transparent conductive films with high transmittance and low resistance.OPTICA APPLICATA,40(1),25-31.
MLA	Wang, Biao,et al."Ta-doped In2O3 transparent conductive films with high transmittance and low resistance".OPTICA APPLICATA 40.1(2010):25-31.