Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing | |
Zhu, Qi-Feng1; Long, Xue-Wen2; Wang, Yue1; Shen, Xiao-Liang1; Guo, Hai-Tao3; Fu, Li-Li1; Liu, Chun-Xiao1 | |
刊名 | Optical Engineering |
2019-05-01 | |
卷号 | 58期号:5 |
关键词 | waveguide magneto-optical glass ion implantation diamond blade dicing |
ISSN号 | 00913286;15602303 |
DOI | 10.1117/1.OE.58.5.057107 |
产权排序 | 1 |
英文摘要 | We report on the fabrication of a ridge waveguide in the Tb3 +-doped aluminum borosilicate glass by combining the 550-keV proton implantation and the precise diamond blade dicing with a rotating speed of 20,000 rpm. The relative atom displacement of the original structure induced by the proton implantation is simulated by Stopping and Range of Ions in Matter 2013 in the Tb3 +-doped aluminum borosilicate glass. The morphology of the ridge waveguide is acquired by scanning electron microscopy. The near-field intensity distribution of the waveguide is recorded by the end-face coupling system, which indicates that the light can be well confined in the ridge waveguide region. © 2019 Society of Photo-Optical Instrumentation Engineers (SPIE). |
语种 | 英语 |
出版者 | SPIE |
WOS记录号 | WOS:000481889500053 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/31602] |
专题 | 特种光纤材料及器件研究中心 |
通讯作者 | Liu, Chun-Xiao |
作者单位 | 1.Nanjing University of Posts and Telecommunications, College of Electronic and Optical Engineering and College of Microelectronics, Nanjing, China; 2.Huaihua University, Department of Physics, Huaihua, China; 3.Chinese Academy of Sciences, Xi'An Institute of Optics and Precision Mechanics, State Key Laboratory of Transient Optics and Photonics, Xi'an, China |
推荐引用方式 GB/T 7714 | Zhu, Qi-Feng,Long, Xue-Wen,Wang, Yue,et al. Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing[J]. Optical Engineering,2019,58(5). |
APA | Zhu, Qi-Feng.,Long, Xue-Wen.,Wang, Yue.,Shen, Xiao-Liang.,Guo, Hai-Tao.,...&Liu, Chun-Xiao.(2019).Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing.Optical Engineering,58(5). |
MLA | Zhu, Qi-Feng,et al."Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing".Optical Engineering 58.5(2019). |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论