Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing
Zhu, Qi-Feng1; Long, Xue-Wen2; Wang, Yue1; Shen, Xiao-Liang1; Guo, Hai-Tao3; Fu, Li-Li1; Liu, Chun-Xiao1
刊名Optical Engineering
2019-05-01
卷号58期号:5
关键词waveguide magneto-optical glass ion implantation diamond blade dicing
ISSN号00913286;15602303
DOI10.1117/1.OE.58.5.057107
产权排序1
英文摘要

We report on the fabrication of a ridge waveguide in the Tb3 +-doped aluminum borosilicate glass by combining the 550-keV proton implantation and the precise diamond blade dicing with a rotating speed of 20,000 rpm. The relative atom displacement of the original structure induced by the proton implantation is simulated by Stopping and Range of Ions in Matter 2013 in the Tb3 +-doped aluminum borosilicate glass. The morphology of the ridge waveguide is acquired by scanning electron microscopy. The near-field intensity distribution of the waveguide is recorded by the end-face coupling system, which indicates that the light can be well confined in the ridge waveguide region. © 2019 Society of Photo-Optical Instrumentation Engineers (SPIE).

语种英语
出版者SPIE
WOS记录号WOS:000481889500053
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/31602]  
专题特种光纤材料及器件研究中心
通讯作者Liu, Chun-Xiao
作者单位1.Nanjing University of Posts and Telecommunications, College of Electronic and Optical Engineering and College of Microelectronics, Nanjing, China;
2.Huaihua University, Department of Physics, Huaihua, China;
3.Chinese Academy of Sciences, Xi'An Institute of Optics and Precision Mechanics, State Key Laboratory of Transient Optics and Photonics, Xi'an, China
推荐引用方式
GB/T 7714
Zhu, Qi-Feng,Long, Xue-Wen,Wang, Yue,et al. Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing[J]. Optical Engineering,2019,58(5).
APA Zhu, Qi-Feng.,Long, Xue-Wen.,Wang, Yue.,Shen, Xiao-Liang.,Guo, Hai-Tao.,...&Liu, Chun-Xiao.(2019).Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing.Optical Engineering,58(5).
MLA Zhu, Qi-Feng,et al."Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing".Optical Engineering 58.5(2019).
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