Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing
Zhang, Jie1; Guo, Wen-Tao1; Tang, Chen-Yang1; Yan, Sen1; Li, Wei-Nan2; Liu, Chun-Xiao1
SourceOptics Communications
2019-12-15
Volume453
ISSN00304018
KeywordWaveguide Yb3+-doped silicate glass Annealing Ion implantation Precise diamond blade dicing
DOI10.1016/j.optcom.2019.124344
Rank2
English Abstract

We firstly report on the planar waveguide via the single-energy proton implantation in the Yb3+-doped silicate glass. The implanted energy and fluence are 400 keV and 8.0×1016 ions/cm2, respectively. The thermal treatment at 200 °C for 1h was used to optimize waveguiding characteristics. The guided-mode spectra in the planar waveguide before and after annealing were characterized by the m-line method at 632.8 and 1539 nm. The distributions of refractive index for the as-implanted and annealed planar waveguides were reconstructed by the reflectivity calculation method. The optical characterizations were conducted at 632.8 nm using the end-fire coupling method before and after the thermal treatment. Then, the ridge waveguide was formed by the precise diamond blade dicing on the annealed planar Yb3+-doped silicate glass waveguide. The microscope image and near-field intensity profile of the ridge waveguide were investigated by the metallographic microscope and the end-face coupling system, respectively. © 2019 Elsevier B.V.

Language英语
WOS IDWOS:000487257300015
PublisherElsevier B.V.
Content Type期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/31695]  
Collection西安光学精密机械研究所_瞬态光学技术国家重点实验室
Corresponding AuthorLiu, Chun-Xiao
Affiliation1.College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing; 210023, China;
2.State Key Laboratory of Transient Optics and Photonics, Xían Institute of Optics and Precision Mechanics, Chinese Academy of Sciences (CAS), Xían; 710119, China
Recommended Citation
GB/T 7714
Zhang, Jie,Guo, Wen-Tao,Tang, Chen-Yang,et al. Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing[J]. Optics Communications,2019,453.
APA Zhang, Jie,Guo, Wen-Tao,Tang, Chen-Yang,Yan, Sen,Li, Wei-Nan,&Liu, Chun-Xiao.(2019).Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing.Optics Communications,453.
MLA Zhang, Jie,et al."Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing".Optics Communications 453(2019).
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