Highly sensitive humidity sensor based on oblique carbon nanoplumes

doi:10.3390/s18103407

	Highly sensitive humidity sensor based on oblique carbon nanoplumes
	Qiao, Siqi 1; Peng, Xiaoyan 1; Wang, Lidan 1; Duan, Shukai 1; Chu, Jin2 ; Jia, Pengfei 1
刊名	Sensors (Switzerland)
	2018
卷号	18 期号:10
ISSN号	14248220
DOI	10.3390/s18103407
英文摘要	In this work, we fabricated three carbon nanoplume structured samples under different temperatures using a simple hot filament physical vapor deposition (HFPVD) process, and investigated the role of surface morphology, defects, and graphitic content on relative humidity (RH) sensing performances. The Van der Drift growth model and oblique angle deposition (OAD) technique of growing a large area of uniformly aligned and inclined oblique arrays of carbon nanoplumes (CNPs) on a catalyst-free silicon substrate was demonstrated. The optimal growing temperature of 800C was suitable for the formation of nanoplumes with larger surface area, more defect sites, and less graphitic content, compared to the other samples that were prepared. As expected, a low detection limit, high response, capability of reversible behavior, and rapid response/recovery speed with respect to RH variation, was achieved without additional surface modification or chemical functionalization. The holes’ depletion has been described as a RH sensing mechanism that leads to the increase of the conduction of the CNPs with increasing RH levels. © 2018 by the authors. Licensee MDPI, Basel, Switzerland.
语种	英语
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/8066]
专题	中国科学院重庆绿色智能技术研究院
作者单位	1.Chongqing Key Laboratory of Non-Linear Circuit and Intelligent Information Processing, College of Electronic and Information Engineering, Southwest University, Chongqing; 400715, China; 2.Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing; 400714, China
推荐引用方式 GB/T 7714	Qiao, Siqi,Peng, Xiaoyan,Wang, Lidan,et al. Highly sensitive humidity sensor based on oblique carbon nanoplumes[J]. Sensors (Switzerland),2018,18(10).
APA	Qiao, Siqi,Peng, Xiaoyan,Wang, Lidan,Duan, Shukai,Chu, Jin,&Jia, Pengfei.(2018).Highly sensitive humidity sensor based on oblique carbon nanoplumes.Sensors (Switzerland),18(10).
MLA	Qiao, Siqi,et al."Highly sensitive humidity sensor based on oblique carbon nanoplumes".Sensors (Switzerland) 18.10(2018).