Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor

doi:10.1109/TASC.2017.2655729

	Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor
	Zhang, Wen1,2 ; Miao, Wei 1,2; Wang, Zheng1,2 ; Liu, Dong1,2 ; Zhong, Jia-Qiang 1,2; Guo, Xiao-Hui 1,2; Wu, F.1,2 ; Yao, QiJun1,2 ; Shi, Sheng-Cai1,2
刊名	IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
	2017-06-01
卷号	27 期号:4 页码:6
关键词	Superconducting transition edge sensor thermal conductance response time noise equivalent power KOH wet etch
ISSN号	1051-8223
DOI	10.1109/TASC.2017.2655729
通讯作者	Zhang, Wen(wzhang@pmo.ac.cn)
英文摘要	Superconducting transition edge sensors (TES) based on a Ti microbridge on Si substrate have demonstrated a very low noise equivalent power. Their effective response time, however, is in the order of microseconds due to relatively high transition temperature (i.e., 300-400 mK) of the Ti microbridge, making it difficult to read out the signal of a large Ti TES array with a SQUID-based multiplexer. We propose a twin-slot antenna coupled superconducting Ti microbridge separated from the antenna feed and supported by a free-standing membrane. Its resistive transition (R-T) and current-voltage (I-V) curves are measured before and after KOH wet etching of the Si substrate underneath the Ti microbridge. The free-standing membrane supported Ti TES with a thickness of 40 nm shows slightly lower transition temperature and higher normal resistance. Its thermal conductance is reduced to similar to 800 pW/ K from similar to 3000 pW/ K. In addition, its effective response time measured with a current pulse signal is about 5 mu s. The uniformity of the 8 x 8 TES array is studied by measuring the distribution of normal resistance and critical temperature. In order to improve the uniformity, we increase the Ti film thickness to 64 nm, and characterize its thermal and electrical features.
WOS关键词	ANTENNA ; BOLOMETER ; MICROCALORIMETER ; RESOLUTION ; TELESCOPE ; THZ
WOS研究方向	Engineering ; Physics
语种	英语
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
WOS记录号	WOS:000395800200001
内容类型	期刊论文
源URL	[http://libir.pmo.ac.cn/handle/332002/23291]
专题	中国科学院紫金山天文台
通讯作者	Zhang, Wen
作者单位	1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China 2.Key Lab Radio Astron, Nanjing 210008, Jiangsu, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Wen,Miao, Wei,Wang, Zheng,et al. Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2017,27(4):6.
APA	Zhang, Wen.,Miao, Wei.,Wang, Zheng.,Liu, Dong.,Zhong, Jia-Qiang.,...&Shi, Sheng-Cai.(2017).Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,27(4),6.
MLA	Zhang, Wen,et al."Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 27.4(2017):6.