Investigation of {111}a and {111} planes of c-gan epilayers grown on gaas(001) by mocvd | |
Zheng, XH; Qu, B; Wang, YT; Feng, ZH; Han, JY; Yang, H; Liang, JW | |
刊名 | Journal of crystal growth |
2001-11-01 | |
卷号 | 233期号:1-2页码:52-56 |
关键词 | X-ray diffraction Metalorganic chemical vapor deposition Gallium compounds |
ISSN号 | 0022-0248 |
通讯作者 | Zheng, xh() |
英文摘要 | A determination of {1 1 1}a and {1 1 1}b in cubic gan(c-gan) was investigated by x-ray diffraction technique in detail. the c-gan films are grown on gaas(0 0 1) substrates by metalorganic chemical vapor deposition(mocvd). the difference of integrated intensities measured by omega scan for the different order diffractions from {1 1 1}a and {1 1 1}b planes in the four-circle diffractometer gives convincing evidence as to which is the {1 1 1}a and which is the {1 1 1}b planes. the lesser deviation between the ratios of /f-h k l/(2)//f-(h) over bar (k) over bar (l) over bar/(2) and the calculated values after dispersion correction for atomic scattering factor shows that the content of parasitic hexagonal gan(h-gan) grown on c-gan{1 1 1}a planes is higher than that on {1 1 1}b planes. the reciprocal space mappings provide additional proof that the h-gan inclusions in c-gan films appear as lamellar structure. (c) 2001 published by elsevier science b.v. |
WOS关键词 | HEXAGONAL GAN ; CUBIC GAN ; GAAS |
WOS研究方向 | Crystallography ; Materials Science ; Physics |
WOS类目 | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
语种 | 英语 |
出版者 | ELSEVIER SCIENCE BV |
WOS记录号 | WOS:000170986400009 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2428990 |
专题 | 半导体研究所 |
通讯作者 | Zheng, XH |
作者单位 | 1.Chinese Acad Sci, Inst Semicond, R&D Ctr Optoelec Technol, Beijing 100083, Peoples R China 2.Chinese Acad Geol Sci, Inst Mineral & Resources, Beijing 100037, Peoples R China |
推荐引用方式 GB/T 7714 | Zheng, XH,Qu, B,Wang, YT,et al. Investigation of {111}a and {111} planes of c-gan epilayers grown on gaas(001) by mocvd[J]. Journal of crystal growth,2001,233(1-2):52-56. |
APA | Zheng, XH.,Qu, B.,Wang, YT.,Feng, ZH.,Han, JY.,...&Liang, JW.(2001).Investigation of {111}a and {111} planes of c-gan epilayers grown on gaas(001) by mocvd.Journal of crystal growth,233(1-2),52-56. |
MLA | Zheng, XH,et al."Investigation of {111}a and {111} planes of c-gan epilayers grown on gaas(001) by mocvd".Journal of crystal growth 233.1-2(2001):52-56. |
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