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	Structural and electronic properties of si nanocrystals embedded in amorphous sic matrix
	Song, Chao1,2,3; Rui, Yunjun1,2; Wang, Quanbiao1,2; Xu, Jun1,2; Li, Wei1,2; Chen, Kunji1,2; Zuo, Yuhua4; Wang, Qiming4
刊名	Journal of alloys and compounds
	2011-03-03
卷号	509期号:9页码:3963-3966
关键词	Silicon carbide Thin films Crystal structure Electronic properties
ISSN号	0925-8388
DOI	10.1016/j.jallcom.2010.12.191
通讯作者	Xu, jun(junxu@nju.edu.cn)
英文摘要	Si-rich hydrogenated amorphous silicon carbide thin films were prepared by plasma-enhanced chemical vapor deposition technique. as-deposited films were subsequently annealed at 900 degrees c and 1000 degrees c to form si nanocrystals embedded in amorphous sic matrix. raman spectra demonstrate the formation of si nanocrystals with size around 7-9 nm. for the sample annealed at 1000 degrees c, the crystallinity can be reached to 70%. as increasing the annealing temperature, the dark conductivity is increased accompanying with the increase of crystallinity of the film. the dark conductivity reaches to 1.2 x 10(-6) scm(-1) for the sample annealed at 1000 degrees c, which is 4 orders of magnitude higher than that of as-deposited film. it is found that the carrier transport process is dominated by the thermally activated transport process according to the temperature-dependent conductivity results. (c) 2011 elsevier b. v. all rights reserved.
WOS关键词	THIN-FILMS ; SILICON ; PHOTOLUMINESCENCE ; SUPERLATTICE ; ALLOYS
WOS研究方向	Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000287968000046
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2428326
专题	半导体研究所
通讯作者	Xu, Jun
作者单位	1.Nanjing Univ, Nanjing Natl Lab Microstruct, Nanjing 210093, Peoples R China 2.Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Peoples R China 3.Hanshan Normal Univ, Dept Phys & Elect Engn, Chaozhou 521041, Peoples R China 4.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Song, Chao,Rui, Yunjun,Wang, Quanbiao,et al. Structural and electronic properties of si nanocrystals embedded in amorphous sic matrix[J]. Journal of alloys and compounds,2011,509(9):3963-3966.
APA	Song, Chao.,Rui, Yunjun.,Wang, Quanbiao.,Xu, Jun.,Li, Wei.,...&Wang, Qiming.(2011).Structural and electronic properties of si nanocrystals embedded in amorphous sic matrix.Journal of alloys and compounds,509(9),3963-3966.
MLA	Song, Chao,et al."Structural and electronic properties of si nanocrystals embedded in amorphous sic matrix".Journal of alloys and compounds 509.9(2011):3963-3966.

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