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	Diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh:h(2)o etching
	Zhang, Xinyu1,2,3; Li, Hui1,2,3; Liu, Kan1,2,3; Luo, Jun1,2,3; Xie, Changsheng1; Ji, An4; Zhang, Tianxu2,3
刊名	Journal of micromechanics and microengineering
	2010-10-01
卷号	20期号:10页码:7
ISSN号	0960-1317
DOI	10.1088/0960-1317/20/10/105029
通讯作者	Zhang, xinyu(x_yzhang@yahoo.com.cn)
英文摘要	A diffractive microlens with a cascade focal plane along the main optical axis of the device is fabricated using a low-cost technique mainly including single mask ultraviolet (uv) photolithography and dual-step koh:h(2)o etching. based on the evolutionary behavior of converse pyramid-shaped microholes (cpsms) preshaped over a {100}-oriented silicon wafer in koh etchant, the first-step koh etching is performed to transfer initial square micro-openings in a sio(2) film grown by plasma enhanced chemical vapor deposition (pecvd) and patterned by single mask uv-photolithography, into cpsms with needed dimension. after completely removing a thinned sio(2) mask, basic annular phase steps with a relatively steep sidewall and scheduled height can be shaped in the overlapped etching region between the neighboring silicon concave-arc microstructures evolved from cpsms through the second-step koh etching. morphological measurements demonstrate a desirable surface of the silicon microlens with a roughness in nanometer scale and the feature height of the phase steps formed in the submicrometer range. conventional optics measurements of the plastic diffractive microlens obtained by further hot embossing the fine microrelief phase map over the nickel mask made through a common electrochemical method indicate a highly efficient cascaded focusing performance.
WOS关键词	OPTICAL-ELEMENTS ; DESIGN ; SILICON ; ARRAYS ; LENSES
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000282270300042
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2428037
专题	半导体研究所
通讯作者	Zhang, Xinyu
作者单位	1.Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Hubei Province, Peoples R China 2.Huazhong Univ Sci & Technol, Natl Key Lab Sci & Technol Multispectral Informat, Wuhan 430074, Hubei Province, Peoples R China 3.Huazhong Univ Sci & Technol, Inst Pattern Recognit & Artificial Intelligence, Wuhan 430074, Hubei Province, Peoples R China 4.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Xinyu,Li, Hui,Liu, Kan,et al. Diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh:h(2)o etching[J]. Journal of micromechanics and microengineering,2010,20(10):7.
APA	Zhang, Xinyu.,Li, Hui.,Liu, Kan.,Luo, Jun.,Xie, Changsheng.,...&Zhang, Tianxu.(2010).Diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh:h(2)o etching.Journal of micromechanics and microengineering,20(10),7.
MLA	Zhang, Xinyu,et al."Diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh:h(2)o etching".Journal of micromechanics and microengineering 20.10(2010):7.

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