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	Planar refractive microlens arrays in indium phosphide and quartz substrates
	Zhang, Xinyu1,2; Xie, Changsheng2; Ji, An3; Tang, Qingle4; Luo, Wei5
刊名	Optical engineering
	2008-05-01
卷号	47期号:5页码:15
关键词	Concave refractive microlens array Planar refractive microlens array Ion beam etching
ISSN号	0091-3286
DOI	10.1117/1.2931076
通讯作者	Zhang, xinyu(x_yzhang@yahoo.com.cn)
英文摘要	Large-area concave refractive microlens arrays, or concave template structures, and then the non-refractive-index-gradient type of planar refractive microlens arrays in inp and quartz substrates, are fabricated utilizing the method consisting of conventional uv photolithography, thermal shaping of concave photoresist microlenses, etching with an argon ion beam of large diameter, and filling or growing optical medium structures onto the curved surfaces of preshaped concave templates. several key conditions for fabricating concave and also planar microlenses are discussed in detail. the concave structures obtained are characterized by scanning electron microscope and surface profile measurements. the far-field optical characteristics of quartz/zro(2) planar refractive microlens arrays have been acquired experimentally. (c) 2008 society of photo-optical instrumentation engineers.
WOS关键词	ION-EXCHANGE ; LENS ARRAYS
WOS研究方向	Optics
WOS类目	Optics
语种	英语
出版者	SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS
WOS记录号	WOS:000257227100015
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2427268
专题	半导体研究所
通讯作者	Zhang, Xinyu
作者单位	1.Huazhong Univ Sci & Technol, State Key Lab Multispectral Informat Proc Technol, Wuhan 430074, Hubei Province, Peoples R China 2.Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Hubei Province, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China 4.Huazhong Res Inst Electropt Technol, Wuhan 430074, Hubei Province, Peoples R China 5.Jiangxi Inst Elect Commun Technol, Nanchang 330029, Jiangxi, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Xinyu,Xie, Changsheng,Ji, An,et al. Planar refractive microlens arrays in indium phosphide and quartz substrates[J]. Optical engineering,2008,47(5):15.
APA	Zhang, Xinyu,Xie, Changsheng,Ji, An,Tang, Qingle,&Luo, Wei.(2008).Planar refractive microlens arrays in indium phosphide and quartz substrates.Optical engineering,47(5),15.
MLA	Zhang, Xinyu,et al."Planar refractive microlens arrays in indium phosphide and quartz substrates".Optical engineering 47.5(2008):15.

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