| Raman scattering detection of stacking faults in free-standing cubic-sic epilayer | |
| Liu Xing-Fang; Sun Guo-Sheng; Li Jin-Min; Zhao Yong-Mei; Li Jia-Ye; Wang Lei; Zhao Wan-Shun; Zeng Yi-Ping | |
| 刊名 | Chinese physics letters
 |
| 2006-10-01 | |
| 卷号 | 23期号:10页码:2834-2837 |
| ISSN号 | 0256-307X |
| 通讯作者 | Liu xing-fang(liuxf@mail.semi.ac.cn) |
| 英文摘要 | We report on stacking fault (sf) detection in free-standing cubic-sic epilayer by the raman measurements. the epilayer with enhanced sfs is heteroepitaxially grown by low pressure chemical vapour deposition on a si(100) substrate and is released in koh solution by micromechanical manufacture, on which the raman measurements are performed in a back scattering geometry. the to line of the raman spectra is considerably broadened and distorted. we discuss the influence of sfs on the intensity profiles of to mode by comparing our experimental data with the simulated results based on the raman bond polarizability (bp) model in the framework of linear-chain concept. good agreement with respect to the linewidth and disorder-induced peak shift is found by assuming the mean distance of the sfs to be 11 angstrom in the bp model. |
| WOS关键词 | SPECTROSCOPY ; GROWTH ; POLYTYPES ; SILICON |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| 出版者 | IOP PUBLISHING LTD |
| WOS记录号 | WOS:000241040300057 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2426643 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liu Xing-Fang |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Novel Semicond Mat Lab, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu Xing-Fang,Sun Guo-Sheng,Li Jin-Min,et al. Raman scattering detection of stacking faults in free-standing cubic-sic epilayer[J]. Chinese physics letters,2006,23(10):2834-2837. |
| APA | Liu Xing-Fang.,Sun Guo-Sheng.,Li Jin-Min.,Zhao Yong-Mei.,Li Jia-Ye.,...&Zeng Yi-Ping.(2006).Raman scattering detection of stacking faults in free-standing cubic-sic epilayer.Chinese physics letters,23(10),2834-2837. |
| MLA | Liu Xing-Fang,et al."Raman scattering detection of stacking faults in free-standing cubic-sic epilayer".Chinese physics letters 23.10(2006):2834-2837. |
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