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	Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering
	Zong, Fujian; Ma, Honglei; Du, Wei; Ma, Jin; Zhang, Xijian; Xiao, Hongdi; Ji, Feng; Xue, Chengshan
刊名	Applied surface science
	2006-09-15
卷号	252期号:22页码:7983-7986
关键词	Optical band gap Zinc nitride films Zinc nitride target Reactive rf magnetron sputtering Absorption coefficient
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2005.10.006
通讯作者	Zong, fujian(fjzong@sdu.edu.cn)
英文摘要	Polycrystalline zinc nitride films have been synthesized onto quartz substrates from the zinc nitride target and the nitrogen working gas by reactive rf magnetron sputtering at room temperature. x-ray diffraction study indicates that polycrystalline zinc nitride films are of cubic structure with the lattice constant a = 0.979(1) nm and have preferred orientations with (3 2 1) and (4 4 2). its absorption coefficients as well as the film thickness are calculated from the transmission spectra, which are measured with a double beam spectrophotometer. the optical band gap has been determined from the photon energy dependence of absorption coefficient, an indirect transition optical band gap of 2.12(3) ev has been obtained. (c) 2005 elsevier b.v. all rights reserved.
WOS关键词	THIN-FILMS ; ZN3N2 POWDER
WOS研究方向	Chemistry ; Materials Science ; Physics
WOS类目	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000240792100040
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426577
专题	半导体研究所
通讯作者	Zong, Fujian
作者单位	1.Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China 2.Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
推荐引用方式 GB/T 7714	Zong, Fujian,Ma, Honglei,Du, Wei,et al. Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering[J]. Applied surface science,2006,252(22):7983-7986.
APA	Zong, Fujian.,Ma, Honglei.,Du, Wei.,Ma, Jin.,Zhang, Xijian.,...&Xue, Chengshan.(2006).Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering.Applied surface science,252(22),7983-7986.
MLA	Zong, Fujian,et al."Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering".Applied surface science 252.22(2006):7983-7986.

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