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	The effects of sputtering power on optical and electrical properties of copper selenide thin films deposited by magnetron sputtering
	Li, Y. Z.1,2; Gao, X. D.1; Yang, C.1,2; Huang, F. Q.1,2
刊名	Journal of alloys and compounds
	2010-09-03
卷号	505期号:2页码:623-627
关键词	Copper selenide thin films Magnetron sputtering Optical band-gap Electrical resistivity
ISSN号	0925-8388
DOI	10.1016/j.jallcom.2010.06.094
通讯作者	Li, y. z.(leeyuntse@sina.com)
英文摘要	The p-type copper selenide thin films were deposited on glass substrate at room temperature by magnetron sputtering. the effects of sputtering power on crystallinity, surface morphology, optical and electrical properties of the copper selenide thin films were investigated. by adjusting the sputtering power, the thickness of as-deposited films varied between 225 nm and 375 nm. the crystallinity, the optical band-gap as well as the electrical conductivity of the as-deposited films were improved substantially. the copper selenide thin film deposited under optimal sputtering power possesses best crystallinity, widest optical band-gap of 2.40 ev and lowest electrical resistivity of 3.94 x 10(-4) omega cm. crown copyright (c) 2010 published by elsevier b.v. all rights reserved.
WOS关键词	ROOM-TEMPERATURE
WOS研究方向	Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000281738000049
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2406013
专题	中国科学院大学
通讯作者	Li, Y. Z.
作者单位	1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Li, Y. Z.,Gao, X. D.,Yang, C.,et al. The effects of sputtering power on optical and electrical properties of copper selenide thin films deposited by magnetron sputtering[J]. Journal of alloys and compounds,2010,505(2):623-627.
APA	Li, Y. Z.,Gao, X. D.,Yang, C.,&Huang, F. Q..(2010).The effects of sputtering power on optical and electrical properties of copper selenide thin films deposited by magnetron sputtering.Journal of alloys and compounds,505(2),623-627.
MLA	Li, Y. Z.,et al."The effects of sputtering power on optical and electrical properties of copper selenide thin films deposited by magnetron sputtering".Journal of alloys and compounds 505.2(2010):623-627.

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