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	Growth and structure of hydrogenated carbon films containing fullerene-like structure
	Wang, Peng1,2; Wang, Xia1,2; Liu, Weimin1; Zhang, Junyan1
刊名	Journal of physics d-applied physics
	2008-04-21
卷号	41期号:8页码:7
ISSN号	0022-3727
DOI	10.1088/0022-3727/41/8/085401
通讯作者	Liu, weimin(wmliu@lzb.ac.cn)
英文摘要	Hydrogenated carbon films were prepared by magnetron sputtering of a titanium target in methane and argon atmosphere. the film grown at -800v bias exhibits excellent mechanical properties with a hardness of 20.9 gpa and an elastic recovery as high as 85%. its structure, characterized by high-resolution transmission electron microscopy, raman spectrum, and x-ray photoelectron spectroscopy, can be described as fullerene-like structures uniformly dispersed in an amorphous carbon matrix. in order to reveal the evolution of fullerene-like structures in our films, different bias voltages were introduced. the results show that high bias voltage leads to the accumulation of high compressive internal stress in the film and promotes the evolution of fullerene-like structures. although the film grown at -800v bias presents high sp(2) bonding content, it exhibits good mechanical properties with high hardness and high elasticity at the same time; we attribute it to the unique structure of the film, in which a fullerene-like structure, just like a molecule spring dispersed in the film, reserves the elastic energy during distortion through reversible bond rotation and bond angle deflection, while the amorphous carbon matrix restrains the relaxation of the rigid c-c network and compressive stress and restricts the slip of graphene sheets.
WOS关键词	DIAMOND-LIKE CARBON ; CNX THIN-FILMS ; AMORPHOUS-CARBON ; MECHANICAL-PROPERTIES ; RAMAN-SPECTROSCOPY ; NITRIDE ; MICROSTRUCTURE ; COATINGS ; STRESS ; NANOCOMPOSITE
WOS研究方向	Physics
WOS类目	Physics, Applied
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000254329500038
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2388603
专题	中国科学院大学
通讯作者	Liu, Weimin
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Wang, Peng,Wang, Xia,Liu, Weimin,et al. Growth and structure of hydrogenated carbon films containing fullerene-like structure[J]. Journal of physics d-applied physics,2008,41(8):7.
APA	Wang, Peng,Wang, Xia,Liu, Weimin,&Zhang, Junyan.(2008).Growth and structure of hydrogenated carbon films containing fullerene-like structure.Journal of physics d-applied physics,41(8),7.
MLA	Wang, Peng,et al."Growth and structure of hydrogenated carbon films containing fullerene-like structure".Journal of physics d-applied physics 41.8(2008):7.

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