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	Strength behaviour of polysilicon thin film flexure hinge
	Zhang, Yongyu[1]; Chen, Xiaoyang[2]; Sha, Ling[3]
	2008
会议名称	7th International Conference on Fracture and Strength of Solids, FEOFS 2007
会议日期	2007-08-27
关键词	polysilicon thin film flexure hinge fatigue MEMS
页码	545-552
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2349075
专题	上海大学
作者单位	[1]Mechanical Engineering College, Shanghai University of Engineering Science, 333 Longteng Road, Shanghai, 201600, China [2]School of Mechatronic Engineering and Automation, Shanghai University, 149 Yanchang Road, Shanghai, 200072, China[3]Mechanical Engineering College, Shanghai University of Engineering Science, 333 Longteng Road, Shanghai, 201600, China
推荐引用方式 GB/T 7714	Zhang, Yongyu[1],Chen, Xiaoyang[2],Sha, Ling[3]. Strength behaviour of polysilicon thin film flexure hinge[C]. 见:7th International Conference on Fracture and Strength of Solids, FEOFS 2007. 2007-08-27.

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