The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition.

	The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition.
	Tunmee, Sarayut; Konkhunthot, Natthaphong; Photongkam, Pat; Wongpanya, Pornwasa; Zhou, XiaoLong; Saitoh, Hidetoshi; Komatsu, Keiji
刊名	THIN SOLID FILMS
	2018
文献子类	期刊论文
英文摘要	Diamond-like carbon (DLC) films were deposited by pulsed filtered cathodic vacuum arc (FCVA) deposition. The microstructure, mechanical and opticalproperties of DLC films have been investigated as functions of the variation in the substrate negative direct current bias voltage (V-bias) from 0.0 to 1.5 kV. Raman and X-ray photoelectron spectroscopy results show a correlation between the I-D/I-G ratio and the microstructure in terms of the sp(3)/sp(2) ratio to V-bias. This fact shows that a significant change in the sp(3) content, which is attributed to the transformation from graphite-like to diamond-like, is accompanied by a decreasing I-D/I-G ratio. The relatively high mass density of the films in the range of 2.51 to 2.79 g/cm(3) can be obtained with biasing. Themechanical properties, i.e., the hardness and elastic modulus, were 13-25 and 114-145 GPa, respectively. The improvement of the mechanical properties is due to the formation of the compressive residual stress and the local density depending on V-bias. The relationship between the refractive index and the I-D/I-G ratio agree well with the microstructure and mechanical properties of DLC films. All of these results indicate a vital role of V-bias in determining the DLC properties.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/14828]
专题	深圳先进技术研究院_其他
推荐引用方式 GB/T 7714	Tunmee, Sarayut,Konkhunthot, Natthaphong,Photongkam, Pat,et al. The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition.[J]. THIN SOLID FILMS,2018.
APA	Tunmee, Sarayut.,Konkhunthot, Natthaphong.,Photongkam, Pat.,Wongpanya, Pornwasa.,Zhou, XiaoLong.,...&Komatsu, Keiji.(2018).The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition..THIN SOLID FILMS.
MLA	Tunmee, Sarayut,et al."The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition.".THIN SOLID FILMS (2018).