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	Study of High Temperature Piezoelectric Scandium Aluminum Nitride Thin Films
	Shi, Xiaolei[1]; Chen, Yigang[2]; Shi, Weimin[3]; Wang, Linjun[4]
	2011
会议名称	SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS
会议日期	2010-09-24
关键词	Scandium Aluminum Nitride piezoelectric coefficient first-principles calculations
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2307420
专题	上海大学
作者单位	1.[1]Shanghai Univ, Dept Elect Informat Mat, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 2.[2]Shanghai Univ, Dept Elect Informat Mat, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 3.[3]Shanghai Univ, Dept Elect Informat Mat, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 4.[4]Shanghai Univ, Dept Elect Informat Mat, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China.
推荐引用方式 GB/T 7714	Shi, Xiaolei[1],Chen, Yigang[2],Shi, Weimin[3],et al. Study of High Temperature Piezoelectric Scandium Aluminum Nitride Thin Films[C]. 见:SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS. 2010-09-24.

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