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	Preparation and optical properties of AlN films using self-prepared AlN target
	Shi, Tianshi[1]; Gu, Feng[2]; Wang, Linjun[3]; Shen, Yue[4]
	2011
会议名称	16th Opto-Electronics and Communications Conference, OECC 2011
会议日期	2011-07-04
页码	731-732
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2306494
专题	上海大学
作者单位	[1]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China[2]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China[3]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China[4]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
推荐引用方式 GB/T 7714	Shi, Tianshi[1],Gu, Feng[2],Wang, Linjun[3],et al. Preparation and optical properties of AlN films using self-prepared AlN target[C]. 见:16th Opto-Electronics and Communications Conference, OECC 2011. 2011-07-04.

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