QQ客服 官方微博 反馈留言

	The effect of substrate temperature on high quality c-axis oriented AZO thin films prepared by DC reactive magnetron sputtering for photoelectric device applications
	He, Bo[1]; Xu, Jing[2]; Xing, HuaiZhong[3]; Wang, ChunRui[4]; Zhang, XiaoDong[5]
刊名	SUPERLATTICES AND MICROSTRUCTURES
	2013
卷号	64页码:319-330
关键词	Al doped ZnO (AZO) DC reactive magnetron sputtering Structure Electrical properties Optical properties
ISSN号	0749-6036
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2289419
专题	上海大学
作者单位	1.[1]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. 2.[2]Shanghai Univ, Instrumental Anal & Res Ctr, Shanghai 200444, Peoples R China. 3.[3]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. 4.[4]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. 5.[5]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China.
推荐引用方式 GB/T 7714	He, Bo[1],Xu, Jing[2],Xing, HuaiZhong[3],et al. The effect of substrate temperature on high quality c-axis oriented AZO thin films prepared by DC reactive magnetron sputtering for photoelectric device applications[J]. SUPERLATTICES AND MICROSTRUCTURES,2013,64:319-330.
APA	He, Bo[1],Xu, Jing[2],Xing, HuaiZhong[3],Wang, ChunRui[4],&Zhang, XiaoDong[5].(2013).The effect of substrate temperature on high quality c-axis oriented AZO thin films prepared by DC reactive magnetron sputtering for photoelectric device applications.SUPERLATTICES AND MICROSTRUCTURES,64,319-330.
MLA	He, Bo[1],et al."The effect of substrate temperature on high quality c-axis oriented AZO thin films prepared by DC reactive magnetron sputtering for photoelectric device applications".SUPERLATTICES AND MICROSTRUCTURES 64(2013):319-330.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。