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	Research Reviews and Prospects of MEMS Reliability
	Hu, Yi[1]; Shen, Xuejin[2]; Zhang, Yongyu[3]; Wang, Zhenlu[4]; Chen, Xiaoyang[5]
刊名	INTEGRATED FERROELECTRICS
	2014
卷号	152页码:8-21
关键词	reliability test reliability failure mode MEMS reliability model
ISSN号	1058-4587
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2277328
专题	上海大学
作者单位	1.[1]Shanghai Univ, Dept Mech Automat Engn, Shanghai 200072, Peoples R China. 2.[2]Shanghai Univ, Dept Mech Automat Engn, Shanghai 200072, Peoples R China. 3.[3]Henan Univ Technol, Zhengzhou 450001, Peoples R China. 4.[4]Shanghai Univ, Dept Mech Automat Engn, Shanghai 200072, Peoples R China. 5.[5]Shanghai Univ, Dept Mech Automat Engn, Shanghai 200072, Peoples R China.
推荐引用方式 GB/T 7714	Hu, Yi[1],Shen, Xuejin[2],Zhang, Yongyu[3],et al. Research Reviews and Prospects of MEMS Reliability[J]. INTEGRATED FERROELECTRICS,2014,152:8-21.
APA	Hu, Yi[1],Shen, Xuejin[2],Zhang, Yongyu[3],Wang, Zhenlu[4],&Chen, Xiaoyang[5].(2014).Research Reviews and Prospects of MEMS Reliability.INTEGRATED FERROELECTRICS,152,8-21.
MLA	Hu, Yi[1],et al."Research Reviews and Prospects of MEMS Reliability".INTEGRATED FERROELECTRICS 152(2014):8-21.

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