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Design of diaphragm structure for piezoresistive pressure sensor using topology optimization (EI收录)
Zhu, Benliang[1]; Zhang, Xianmin[1]; Zhang, Yanzhen[2]; Fatikow, Sergej[3]
刊名Structural and Multidisciplinary Optimization
2017
卷号55页码:317-329
关键词Electromechanical devices MEMS Microelectromechanical devices Optimization Pressure sensors Product design Shape optimization Topology
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2187994
专题华南理工大学
作者单位1.[1] Guangdong Province Key Laboratory of Precision Equipment and Manufacturing Technology, South China University of Technology, Guangzhou
2.Guangdong
3.510640, China
4.[2] Department of Chemistry, School of Mathematics and Science, University of Oldenburg, Oldenburg
5.D-26111, Germany
6.[3] Division Microrobotics and Control Engineering, University of Oldenburg, Oldenburg
7.D-26111, Germany
推荐引用方式
GB/T 7714
Zhu, Benliang[1],Zhang, Xianmin[1],Zhang, Yanzhen[2],等. Design of diaphragm structure for piezoresistive pressure sensor using topology optimization (EI收录)[J]. Structural and Multidisciplinary Optimization,2017,55:317-329.
APA Zhu, Benliang[1],Zhang, Xianmin[1],Zhang, Yanzhen[2],&Fatikow, Sergej[3].(2017).Design of diaphragm structure for piezoresistive pressure sensor using topology optimization (EI收录).Structural and Multidisciplinary Optimization,55,317-329.
MLA Zhu, Benliang[1],et al."Design of diaphragm structure for piezoresistive pressure sensor using topology optimization (EI收录)".Structural and Multidisciplinary Optimization 55(2017):317-329.
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