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	Effect of Homo-buffer Layers on the Properties of Sputtering Deposited Ga2O3 Films
	Huang, Jian[1]; Li, Bing[2]; Ma, Yuncheng[3]; Tang, Ke[4]; Huang, Haofei[5]; Hu, Yan[6]; Zou, Tianyu[7]; Wang, Linjun[8]
	2018
会议名称	INTERNATIONAL CONFERENCE ON SMART ENGINEERING MATERIALS (ICSEM 2018)
会议日期	2018-01-01
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2171958
专题	上海大学
作者单位	1.[1]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 3.[3]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 4.[4]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 5.[5]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 6.[6]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 7.[7]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 8.[8]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Huang, Jian[1],Li, Bing[2],Ma, Yuncheng[3],et al. Effect of Homo-buffer Layers on the Properties of Sputtering Deposited Ga2O3 Films[C]. 见:INTERNATIONAL CONFERENCE ON SMART ENGINEERING MATERIALS (ICSEM 2018). 2018-01-01.

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