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Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter
Q.B. Lin; C. Zhang; G. He; B. Yang; L. Zhu; Y.C. Zhang; X.S. Jiang
刊名Journal of Alloys and Compounds
2018
关键词Sputtering Oxygen partial pressure ratio α-IGZO Thin film transistors Inverter
ISSN号0925-8388
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2156949
专题安徽大学
作者单位1.a School of Electronics and Electrical Engineering, Chuzhou University, Chuzhou 239000, PR China
2.School of Physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230039, PR China
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GB/T 7714
Q.B. Lin,C. Zhang,G. He,et al. Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter[J]. Journal of Alloys and Compounds,2018.
APA Q.B. Lin.,C. Zhang.,G. He.,B. Yang.,L. Zhu.,...&X.S. Jiang.(2018).Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter.Journal of Alloys and Compounds.
MLA Q.B. Lin,et al."Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter".Journal of Alloys and Compounds (2018).
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