Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter | |
Q.B. Lin; C. Zhang; G. He; B. Yang; L. Zhu; Y.C. Zhang; X.S. Jiang | |
刊名 | Journal of Alloys and Compounds
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2018 | |
关键词 | Sputtering Oxygen partial pressure ratio α-IGZO Thin film transistors Inverter |
ISSN号 | 0925-8388 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2156949 |
专题 | 安徽大学 |
作者单位 | 1.a School of Electronics and Electrical Engineering, Chuzhou University, Chuzhou 239000, PR China 2.School of Physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230039, PR China |
推荐引用方式 GB/T 7714 | Q.B. Lin,C. Zhang,G. He,et al. Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter[J]. Journal of Alloys and Compounds,2018. |
APA | Q.B. Lin.,C. Zhang.,G. He.,B. Yang.,L. Zhu.,...&X.S. Jiang.(2018).Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter.Journal of Alloys and Compounds. |
MLA | Q.B. Lin,et al."Oxygen partial pressure ratio modulated electrical performance of amorphous InGaZnO thin film transistor and inverter".Journal of Alloys and Compounds (2018). |
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