Pure adaptive interferometer for free form surfaces metrology | |
Benli Yu and Jingsong Li; Lei Zhang; Tianbo He; Yu Liu; Sheng Zhou; Dong Li | |
刊名 | Optics Express |
2018 | |
卷号 | Vol.26 No.7页码:7888-7898 |
关键词 | Instrumentation, measurement, and metrology Metrology Surface measurements, figure |
ISSN号 | 1094-4087 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2155115 |
专题 | 安徽大学 |
作者单位 | 1.com 2.Research Center of Laser Fusion, China Academy of Engineering Physics, 621900, Mianyang, China 3.optzl@ahu.edu.cn 4.Key Laboratory of Opto-electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei, 230601, China 5.ljs0625@12 |
推荐引用方式 GB/T 7714 | Benli Yu and Jingsong Li,Lei Zhang,Tianbo He,et al. Pure adaptive interferometer for free form surfaces metrology[J]. Optics Express,2018,Vol.26 No.7:7888-7898. |
APA | Benli Yu and Jingsong Li,Lei Zhang,Tianbo He,Yu Liu,Sheng Zhou,&Dong Li.(2018).Pure adaptive interferometer for free form surfaces metrology.Optics Express,Vol.26 No.7,7888-7898. |
MLA | Benli Yu and Jingsong Li,et al."Pure adaptive interferometer for free form surfaces metrology".Optics Express Vol.26 No.7(2018):7888-7898. |
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