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Pure adaptive interferometer for free form surfaces metrology
Benli Yu and Jingsong Li; Lei Zhang; Tianbo He; Yu Liu; Sheng Zhou; Dong Li
刊名Optics Express
2018
卷号Vol.26 No.7页码:7888-7898
关键词Instrumentation, measurement, and metrology Metrology Surface measurements, figure
ISSN号1094-4087
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2155115
专题安徽大学
作者单位1.com
2.Research Center of Laser Fusion, China Academy of Engineering Physics, 621900, Mianyang, China
3.optzl@ahu.edu.cn
4.Key Laboratory of Opto-electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei, 230601, China
5.ljs0625@12
推荐引用方式
GB/T 7714
Benli Yu and Jingsong Li,Lei Zhang,Tianbo He,et al. Pure adaptive interferometer for free form surfaces metrology[J]. Optics Express,2018,Vol.26 No.7:7888-7898.
APA Benli Yu and Jingsong Li,Lei Zhang,Tianbo He,Yu Liu,Sheng Zhou,&Dong Li.(2018).Pure adaptive interferometer for free form surfaces metrology.Optics Express,Vol.26 No.7,7888-7898.
MLA Benli Yu and Jingsong Li,et al."Pure adaptive interferometer for free form surfaces metrology".Optics Express Vol.26 No.7(2018):7888-7898.
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