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题名	ZrN基低辐射镀膜玻璃研究; Research of the ZrN based Low-e multilayer coatings
作者	Shi C(石川)
学位类别	硕士
答辩日期	2007-06-07
授予单位	中国科学院广州能源研究所
授予地点	广州能源研究所
导师	徐刚
关键词	Low-e薄膜 磁控溅射 透过率 老化
其他题名	research of the zrn based low-e multilayer coatings
中文摘要	for energy saving in a building, low emission (low-e) coating on window glass is the important part of modern energy-efficient window technology. at present, many studies around the world are focused on simple fabrication methods, low cost, and good performance of the low-e films. in this thesis, we investigate the zrn based low-e multilayer coating prepared by rf magnetism sputtering, putting the emphasis on the effect of the fabrication conditions as well as thermal aging on the optical performance of the coatings. the multilayer of zro2/zrn/zro2 was fabricated on quartz glass, with sputtering zr metallic target in a mixed atmosphere of n2 +ar for zrn and o2+ar for zro2 film. first, fabrication conditions for zrn film are studied in detail, such as the deposition temperature, gas flow ratio, rf sputtering power, negative bias voltage, and so on. second, two kinds of multilayers were produced. that is, the layer thickness is 40nm/40nm/40nm and 170nm/40nm/40nm corresponding to the zro2/zrn/zro2/glass structure, of which the thickness outer zro2 layer was just changed in order to examine its effect on durability of the multilayer during aging test. both multilayers show good solar selectivity with an appearance of neutral color. aging tests have been done. it shows that thermal stability of the two multilayers is almost the same, but corrosion resistivity is stronger for the 170nm/40nm/40nm multilayer than the thinner one, due to the thicker outer layer of zro2.
语种	中文
公开日期	2011-07-10 ; 2011-07-15
页码	67
内容类型	学位论文
源URL	[http://ir.giec.ac.cn/handle/344007/4025]
专题	中国科学院广州能源研究所
推荐引用方式 GB/T 7714	石川. ZrN基低辐射镀膜玻璃研究, Research of the ZrN based Low-e multilayer coatings[D]. 广州能源研究所. 中国科学院广州能源研究所. 2007.

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