High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate

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	High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate
	Li MF; He JF
刊名	applied physics letters
	2011
卷号	98 期号:20 页码:article no.201104
关键词	I-N PHOTODIODES
ISSN号	0003-6951
通讯作者	liu, sq, chinese acad sci, state key lab integrated optoelect, inst semicond, pob 912, beijing 100083, peoples r china. sqliu@semi.ac.cn ; hanqin@red.semi.ac.cn
学科主题	光电子学
收录类别	SCI
资助信息	national natural foundation of china [60876039]; hi-tech research and development program of china (863 program) [2007aa03z421, 2009aa03z404]; national basic research program of china (973 program) [2006cb302802]
语种	英语
公开日期	2011-07-05 ; 2011-07-15
附注	in this letter, we demonstrated a top illuminated 1.55 mu m metamorphic ingaas resonant-cavity-enhanced p-i-n photodetector grown on gaas substrate. the photodetectors were grown by a solid-source molecular beam epitaxy system. the high quality linearly graded inxal0.4ga1-x-0.4as metamorphic buffer layer enabled photodiodes to achieve ultralow dark current densities of 2.3 x 10(-6) a/cm(2) at 0 v and 4.2 x 10(-5) a/cm(2) at a reverse bias of 5 v. a high quantum efficiency of 84.4% at resonant wavelength of 1542 nm, a full width at half maximum about 14 nm, and a -3 db bandwidth up to 13 ghz were also obtained. (c) 2011 american institute of physics. [doi:10.1063/1.3592569]
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/20951]
专题	半导体研究所_集成光电子学国家重点实验室
推荐引用方式 GB/T 7714	Li MF,He JF. High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate[J]. applied physics letters,2011,98(20):article no.201104.
APA	Li MF,&He JF.(2011).High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate.applied physics letters,98(20),article no.201104.
MLA	Li MF,et al."High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate".applied physics letters 98.20(2011):article no.201104.