Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load

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	Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load
	Zhu YF ; Zhang FX ; Yang JL ; Zheng HY ; Yang FH
刊名	journal of microelectromechanical systems
	2011
卷号	20 期号:1 页码:178-183
关键词	Cyclic mechanical property resonant frequency stability submicrometer-thick cantilever ENERGY-DISSIPATION STRUCTURAL FILMS THIN-FILMS FATIGUE
ISSN号	1057-7157
通讯作者	zhu, yf, chinese acad sci, inst semicond, beijing 100083, peoples r china. yfzhu@semi.ac.cn ; jlyang@semi.ac.cn
学科主题	微电子学
收录类别	SCI
资助信息	ministry of science and technology of china [2009cb320305, 2011cb933102]
语种	英语
公开日期	2011-07-06 ; 2011-07-15
附注	the stability of mechanical properties of submicrometer-thick cantilevers was systematically investigated under different conditions: driving force, vacuum, humidity, and temperature. for the submicrometer-thick cantilever, the cyclic test did not lead to failure but resulted in distinguish resonant-frequency shift. the frequency shift is caused by fatigue stress, adsorption/desorption, and temperature-induced lever softening effect. at a vacuum of 10(-3) pa, the stress change makes a dominant contribution to the frequency shift, and the desorption-induced lever softening is a secondary factor. the resonant frequency continuously goes down with the cycles, and this frequency shift increases with the driving force of the lever. at a vacuum of 1 pa, the resonant frequency is nearly unchanged until 10(9) cycles. humid air accelerates water adsorption and dramatically enhances the lever stiffness, resulting in frequency increase. at room temperature, the q factors of the lever change a little with the cycles in spite of the frequency decrease. at elevated temperature (100 degrees c and 200 degrees c), the frequency and q factors increase with the cycles due to the dominant desorption.
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/21333]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Zhu YF,Zhang FX,Yang JL,et al. Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load[J]. journal of microelectromechanical systems,2011,20(1):178-183.
APA	Zhu YF,Zhang FX,Yang JL,Zheng HY,&Yang FH.(2011).Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load.journal of microelectromechanical systems,20(1),178-183.
MLA	Zhu YF,et al."Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load".journal of microelectromechanical systems 20.1(2011):178-183.